Raws li semiconductor thev naus laus zis txuas ntxiv mus rau 7nm, 5nm, wafe 5 sharecritical wafer tu tshuab muab kev daws teeb meem tshiab rau Cov teeb meem no los ntawm kev siv tus kheej lub cev ntawm cov kua dej supercritical .
Cov yam ntxwv ntawm Supercritical Wafer Tu Technology
Peb lub tuam txhab muaj kev nplua nuj nyob rau hauv supercritical carbon dioxide kua tshuab thiab cuab yeej siv, thiab cov supercritical wafer tu cov khoom siv tau tsim muaj cov yam ntxwv hauv qab no:
Clamp qhib kev ntxuav cov cav tov qauv qauv tsim qauv, thiab phau ntawv ntsia liaj qhov rooj txhav txhav kom haum rau kev ua haujlwm yooj yim;
Independent sab hauv tu khib tsim tsim, tuaj yeem ua tau kom muaj qhov sib txawv ntawm cov wafers;
Mekas Adsorption Ntauwd qauv qauv, tuaj yeem adsorb thiab rov qab cov tshuaj lom neeg tshuaj lom neeg;
Customized cov khoom siv siab huv tshiab huv steel, kom tau raws li cov yam ntxwv ntawm semiconductor wafer cov khoom yuav tsum tau;
Tsim Tsim, Kev Pom Kev Tsim Tshuaj, kom tsis txhob muaj cov khoom zoo yuav ua kom cov wafefer;
Tsis siv neeg tsis siv neeg tswj .
Peb lub tuam txhab tuaj yeem hloov kho cov qauv tsim thiab cov khoom siv tau ntau lawm raws li cov yam ntxwv ntawm cov neeg siv khoom ntawm cov neeg siv khoom.
Lub ntsiab kev tsis sib xws
| Tsis muaj . |
lub npe
|
Chaw ua uas tsis tau haus
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| 1 | Lub taub hauv sab hauv ntawm lub tank ntxuav | 110mm rau 400mm |
| 2 |
Wafer Tu cov specifications |
4 ", 6", 8 "thiab 12" |
| 3 |
Ntau tshaj plaws ua haujlwm siab |
40MPA |
| 4 |
Qhov kub tshaj plaws |
150 Qib |
| 5 |
Khoom |
Cov Hlau Huv Huv Huv Huv (EP) |
| 6 |
CO2 Pom Qhov Tseeb |
Tsis pub tsawg tshaj 0.08um |
| 7 |
Kev tswj hom |
TSIS SIV NEEG TSIS SIV NEEG |
| 8 |
Tus naj npawb ntawm Wafers ua tiav |
ntau dua 5 |
Cov Cheebtsam Ntawm Supercritical Wafer Tu Khoom
CO₂ Muab Txheej Txheem
1.} cia tank (rau cov kua?
{{0 {}} cua siab siab (nias lub tshuab siab (nias COG rau lub xeev supercritical)
3. rhaub dej (tswj cov kub siab kub)
01
Tu Chamber
{{0 {{}} qhov siab siab tiv taus (50 mpa lossis siab dua)
{{0 {}} wafer yas dhos (txuag wafers nyob rau hauv qhov chaw)
{{0 {}} kua dej huv (kom huv si tu)
02
Tswj Qhov Kub Tswj
{{0 {}} cua sov (tswj qhov kub thiab txias)
{{02. cua txias (txias lub kaw lus tom qab cov txheej txheem)
03
Rov Qab System
{{01. separator (cais co₂ thiab cov paug)
2.} Purification Chav (rov ua dua CO₂)
04
Tswjhwm system
1.} tswj hwm siab, kub thiab txaus
2.} saib cov txheej txheem tu
05
Cov ntawv thov tam sim no nyob rau hauv cov khoom lag luam semiconductor
Tam sim no, supercritical wafectrical tu cov khoom siv tau pom cov ntaub ntawv qhia txog lub ntiaj teb no nyob rau hauv cov kab kev tsim khoom lag luam xws li cov kab kev tsim khoom lag luam, feem ntau rau cov txheej txheem tu cov txheej txheem {{2}
Supercritical Wafer Tu Technology sawv cev rau cov kev lag luam tu cov txheej txheem ntawm cov khoom siv tu cov khoom siv samiconductor Kev tsim cov nroj tsuag cov nroj tsuag raws li cov thev naus laus zis zuj zus thiab kev lag luam kev lag luam txhim kho .
Cim npe nrov: Supercritical Wafer Tu cov khoom, Tuam Tshoj, tuam ntxhab, cov chaw muag khoom, Hoobkas, Mekas